INFICON RSH-600 Rotary Sensor - Manual (Page 21)

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RSH-600 Operating Manual
The clamping ring should be left attached to the head during crystal changing. Only
the head cover should be removed so the alignment process will not have to be
repeated unless the head is removed from the chamber.
If no flange was ordered and you are making your own adjustable flange, the
factory can provide essential dimensions and O-rings.
2.5 Cooling System
The direction of the water flow is not important. Use 1/4 inch plastic tubing to
connect one port to a water supply. The water flow rate should be 5 L/m (1.3 g/m)
at 2 kg/cm
2
(28 psi). Water temperature should be less than 30°C. Connect the
other port to a drain or water recycle system.
2.6 Air Supply
Use 1/4 in. plastic tubing to connect the air inlet port to an air supply. Make sure the
plastic tube is rated higher than 55 psi. The air pressure should be regulated to
4 kg/cm
2
(55 psi).
2.7 Crystal Position Feedback Connections
The Crystal Position Connector has 7 pins. Pin numbers 1 through 6 correspond to
the six crystals and pin number 7 is the common pin. A short between pin 7 and
one of the pins 1 through 6 indicates the active crystal. For example, if pin 7 is
shorted to pin 1, then crystal 1 is the active crystal.
Use this connector to interface with your controller for automatic crystal selection.
Refer to your controller’s operating manual for programming instruction.
Figure 2-5 Crystal Position Connector