2 materials, 3 installation requirements – INFICON Front Load Single Sensor User Manual

Page 18

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1 - 8

PN

07

4-

15

6N

Front Load Single and Dual Sensors Operating Manual

1.5.2 Materials

Body and Holder . . . . . . . . . . . . . . . 304 stainless steel

Springs, Electrical Contacts . . . . . . . Au plated Be-Cu

Water Tubes . . . . . . . . . . . . . . . . . . . 304 stainless steel

In-Vacuum Cable . . . . . . . . . . . . . . . Silver coated copper, Teflon® insulated

Electrical Connector . . . . . . . . . . . . . Glass insulated

Insulators . . . . . . . . . . . . . . . . . . . . . >99% Al

2

O

3

Braze . . . . . . . . . . . . . . . . . . . . . . . . Vacuum process high temperature

Ni-Cr alloy

1.5.3 Installation Requirements

Feedthrough. . . . . . . . . . . . . . . . . . . Without Shutter

Two pass water 4.8 mm (3/16 in.)
OD tubing with Microdot® coax connector
(see

section 1.8.3 on page 1-25

)

With Shutter
Three pass tubes (two water and one air)
4.8 mm (3/16 in.) OD tubing with Microdot
coax connector
(see

section 1.8.3 on page 1-25

)

Vacuum tight braze or weld joint or
connectors for the water tubes
(welded connections or connections using
Ultra-Torr® O-ring compression fittings may
be provided by INFICON if
sensor/feedthrough combination is
ordered, see

Figure 1-2 on page 1-4

)

Other . . . . . . . . . . . . . . . . . . . . . . . . XIU or oscillator to match specific

controller/monitor

The cable length from the crystal to the
oscillator should not exceed 101.6 cm
(40 in.) unless a ModeLock instrument is
used. Refer to the controller/monitor
operating manual for cable length limitations.

SL-X1XXX only: Solenoid Valve for air,
PN 750-420-G1
(see

section 3.1 on page 3-1

)

Water Flow Rate. . . . . . . . . . . . . . . . Minimum water flow 150 to 200 cm

3

/min,

30°C maximum

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