INFICON Front Load Single Sensor User Manual
Page 55
2 - 9
PN
07
4-
15
6N
Front Load Single and Dual Sensors Operating Manual
CAUTION
Excessive application of brazing material, or
excessive heat due to brazing, may result in
blockage of the water tube.
Verify that the tubes are not blocked with braze material by blowing
compressed air through the tubes.
Thoroughly clean the braze joint and helium leak test before installing the
sensor and feedthrough into the process chamber.
9
With all water tube and air tube connections installed, install the sensor and
feedthrough assembly into the process system and secure all retaining
hardware.
10
Shield the coaxial cable from heat radiating from the evaporant source or the
substrate heater. This can be accomplished, if the process allows, by wrapping
aluminum foil around the cable and water tubes.
11
Connect the external water tubes from the feedthrough to the water supply
system and flow controller. Use detachable couples (Swagelok or equivalent)
for external water tube connections.
12
Apply water at the specified flow rate (refer to
), and verify that the water connections are tight.
13
Attach air connection to solenoid valve (see
) and adjust air pressure
to be 70 psi (gauge) {85 psi (absolute)} (5.8 bar (absolute)) [584 kPa (absolute)]
(minimum) to 80 psi (gauge) {95 psi (absolute)} (6.5 bar (absolute))
[653 kPa (absolute)] (maximum).
WARNING
Do not exceed 100 psi (gauge) {115 psi (absolute)}
(7.9 bar (absolute)) [791 kPa (absolute)].
Connection to excessive pressure may result in personal
injury or equipment damage.
NOTE: Because of geometric factors, variations in surface temperature, and
differences in electrical potential, the crystal and substrates often do not
receive the same amount of material. Calibration is required to make sure
the thickness indication on the instrument accurately represents the
thickness on the substrates. Refer to the instrument operating manual for
calibration procedures.