2 digital multimeter, Section 5.1.2 – INFICON Front Load Single Sensor User Manual
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07
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Front Load Single and Dual Sensors Operating Manual
5.1.2 Digital Multimeter
A useful tool for diagnosing sensor problems is the Digital Multimeter (DMM).
To isolate the cause of a sensor problem, perform electrical isolation and continuity
checks, starting with the Electrical Isolation Check,
Thermal instability: large
changes in thickness reading
during source warm-up (usually
causes thickness reading to
decrease) and after the
termination of deposition
(usually causes thickness
reading to increase).
Crystal not properly seated.
Check and clean the crystal
seating surface of the crystal
holder. Refer to
Excessive heat applied to the
crystal.
If heat is due to radiation from
the evaporation source, move
sensor farther away from source
and use Low Thermal Shock
crystals (PN SPC-1157-G10) for
better thermal stability.
If the source of crystal heating is
due to a secondary electron
beam, change regular sensor to
a sputtering sensor.
No cooling water.
Check cooling water flow rate.
Heat induced from electron flux. Use sputtering head for
non-magnetron sputtering.
Poor thickness reproducibility.
Erratic source emission
characteristics.
Move sensor to a different
location.
Check the evaporation source
for proper operating conditions.
Ensure relatively constant pool
height and avoid tunneling into
the melt.
Use multiple sensor option if
available on controller.
Material does not adhere to the
crystal.
Check the cleanliness of the
crystal.
Use gold or silver or alloy
crystals, as appropriate.
Evaporate an intermediate layer
of proper material on the crystal
to improve adhesion.
Table 5-1 Symptom, Cause, Remedy (continued)
SYMPTOM
CAUSE
REMEDY