Drive shaft speed vs. crucible speed, Example: using the mpi indexer with the mdc-360, Example: using the mpi indexer with the mdc-360 -5 – INFICON MPI-16 Crucible Indexer User Manual

Page 39: Able, Peed, Ettings

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MPI-16 & MPI-16H POCKET INDEXERS


Operation 4-5

switch located on the MPI-16 to Remote, indicating you will be controlling the
speed remotely. Then, as long as the Auto/Man. switch on the Remote Panel is
set to Man., you will be able to control the sweeping speed during run-time with
the Remote Panel’s Speed Select switch.

• If you need to change the Speed Select setting as part of your Deposition

Controller’s program, make sure that the correct connections have been made
between your controller and the MPI-16 (see Figure 3-7). You must set the
Speed Select switch located on the MPI-16 to Remote, indicating you will be
controlling the speed remotely. Then, as long as the Auto/Man. switch on the
Remote Panel is set to Auto, you will be able to control the sweeping speed
during run-time through your Deposition Controller’s I/Os. Refer to Table 4-3 for
speed selection via the indexer’s inputs.

4.2.4.1

Drive Shaft Speed vs. Crucible Speed

The speed at the shaft is four times as fast as the speed of the crucible, since a 4:1 speed
reduction gear is typically included in industry standard crucibles. Table 4-4 lists the
drive shaft speed vs. the speed at the crucible.

Speed at Motor Shaft (RPM)

Speed at Crucible (RPM)

16 4

8 2
4 1
2 1/2
1 1/4

1/2 1/8
1/4 1/16
1/8 1/32

Table 4-4 Speed Settings

4.2.5 Example: Using the MPI Indexer with the MDC-360
This example shows how to interface the MDC-360/361/370 with the MPI-16 in BCD
Control mode. Interfacing the MPI-16 to a non-INFICON controller may differ slightly
depending the controller used. Consult the manual of your Deposition Controller for
more information on interfacing it with the MPI-16 in either BCD Control or Direct
Control mode.

1. Make sure that you have properly connected the MDC-360 as shown in Figure

3-7.

2. Begin by turning on the MDC-360 and exiting Abort mode.
3. Under the Main Menu, select “Edit System Setup”
4. Select “Edit Source Setup”
5. Select a Source Setup number to be associated with your specific crucible.
6. Set the number of pockets parameter to match your crucible.
7. Set the Control Parameter to BCD.

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