2 technical data – INFICON PCG55x ATM to Medium Vacuum Gauge User Manual
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tina56e1-d (2014-01)
2 Technical
Data
For further technical data for gauges with DeviceNet and
Profibus interface
→ [3], [4], [5], [6].
Measurement range
5×10
-5
… 1500 mbar
Measurement principle
10 mbar … 1500 mbar
diaphragm capacitive
sensor
1 … 10 mbar
crossover range
5×10
-5
… 1 mbar
thermal conductance acc. to
Pirani
Accuracy (N
2
)
5Ч10
-4
… 1Ч10
-3
mbar
±50% of
reading
1×10
-3
… 100 mbar
±15% of reading
100 … 950 mbar
±5%
of reading
950 … 1050 mbar
±2.5% of reading
Repeatability (N
2
)
1×10
-3
… 1100 mbar
±2% of
reading
Output signal (measurement signal)
Voltage range
3PCx-0xx-xxx0
0 … +10.23 V
3PCx-0xx-xxx1
0 … +8.68 V
3PCx-0xx-xxx2
0 … +5.659 V
3PCx-0xx-xxx3
0 … +9.05 V
Measurement range
3PCx-0xx-xxx0
+0.61 … +10.23 V
3PCx-0xx-xxx1
+1.2 … +8.68 V
3PCx-0xx-xxx2
+0.375 … +5.659 V
3PCx-0xx-xxx3
+1.57 … +9.05 V
Error signal
0 V (default)