5 deinstallation, 1 power connection, 2 vacuum connection – INFICON SKY CDG100D 0.1 ... 1000 Torr / mbar User Manual
Page 34
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tina52e1-d (2014-02)
5 Deinstallation
Preconditions:
• Vacuum system vented
• Vacuum system cooled to <50 °C
5.1 Power
Connection
Put the gauge out of operation.
Unfasten the lock screws and disconnect the sensor cable.
5.2 Vacuum
connection
DANGER
DANGER: hot surface
Touching the hot surface (>50 °C) can cause
burns.
Put the product out of operation and allow it to cool
down.
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
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