INFICON SKY CDG100D 0.1 ... 1000 Torr / mbar - Manual (Page 4)

4 tina52e1-d (2014-02)
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with D-Sub 15-pin connector
and DN 16 ISO-KF vacuum connection. They apply to the other
gauges by analogy.
We reserve the right to make technical changes without prior
notice.
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the CDG100 series are intended for absolute pressure mea-
surement of gases in their respective pressure ranges (
→  3).
The gauges belong to the SKY
®
Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate controller.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 100°C which results in a
compensation of changes in the ambient conditions and a re-
duced deposition of process products and by-products in pro-
cess applications. An integrated baffle protects the sensor
against coating.
Trademarks
SKY
®
INFICON GmbH
VCR
®
Swagelok Marketing Co.