Nor-Cal Intellisys TSS - Manual (Page 8)

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4.0 - Theory of Operation
The TSS-series valve is designed for downstream pressure control. As such,
it is one of four important components in a pressure control system. The other
three essential components include a host system computer, a controller mod-
ule (APC, iQA or iQD) and one or two vacuum gauges, such as a Capacitance
Diaphragm Gauge (CDG). Most manufacturers’ vacuum gauges can be used
to provide the vacuum measurement signal, provided they have a voltage out-
put proportional to pressure. Please see Appedix i for summarized connection
information. More complete signal pin-out and communications information
can be found in Nor-Cal Adaptive Pressure Controller Operating Manual, part
# APC-OP-LiT
FIGURE 4.1 – TypICAL INSTALLATION AND CONFIGURATION OF A
TSS-SERIES CONTROL VALVE (DAShED LINES REpRESENT TSS-IqA
OR IqD INSTALLATION)
Initialization Sequence: Before typical pressure or position control can
begin, the TSS-series valve needs to complete an initialization sequence that
lasts for approximately 30-40 seconds, depending on the size and start-
ing position of the valve. The primary purpose for this operation is for the
controller to determine the fully open and closed points, as well as for certain
motor and position calibration steps to occur. When the valve controller is
first powered on, the amber FAULT light will be illuminated and the OPEN/
CLOSE LEDs will blink in an alternating fashion. To start the initialization
sequence, press OPEN-OPEN-CLOSE-CLOSE on the controller panel. Once
the initialization sequence is complete, the valve will move to the fully open
position and the green OPEN LED will illuminate.
4. Theory of Operation
The TSS-series valve is designed for downstream pressure control. As such, it is one of four important
components in a pressure control system. The other three essential components include a host system
computer, a controller module (APC, IQA or IQD) and one or two vacuum gauges, such as a Capacitance
Diaphragm Gauge (CDG). Most manufacturers’ vacuum gauges can be used to provide the vacuum
measurement signal, provided they have a voltage output proportional to pressure. Please see Appedix I
for summarized connection information. More complete signal pin-out and communications information
can be found in Nor-Cal Adaptive Pressure Controller Operating Manual, part # APC-OP-LIT
Vacuum
Chamber
APC Controller
Vacuum gauge(s)
Host system with RS-
232, Analog/TTL or
DeviceNet
communications
Nor-Cal TSS-series valve
Pump
Figure 4.1 – Typical installation and configuration of a TSS-series control valve
(dashed lines represent TSS-IQA or IQD installation)
Initialization Sequence : Before typical pressure or position control can begin, the TSS-series valve
needs to complete an initialization sequence that lasts for approximately 30-40 seconds, depending on
the size and starting position of the valve. The primary purpose for this operation is for the controller to
determine the fully open and closed points, as well as for certain motor and position calibration steps to
occur. When the valve controller is first powered on, the amber FAULT light will be illuminated and the
OPEN/CLOSE LEDs will blink in an alternating fashion. To start the initialization sequence, press OPEN-
OPEN-CLOSE-CLOSE on the controller panel. Once the initialization sequence is complete, the valve
will move to the fully open position and the green OPEN LED will illuminate.
Normal Operation : After the initialization sequence is complete normal operation of the TSS control
valve is possible. There are two primary modes of operation, a) position control mode and b) pressure
control mode.
In Position control mode the valve will move to any position in its range based on a position set-point
command from the host. The valve will remain in that position until instructed to do otherwise. Position
control mode can be useful in certain cases where pre-determined amount of baffling or throttling is
necessary.
Pressure control mode, on the other hand, is used whenever control to a specific system pressure level is
desired. The host provides the set-point value and the throttle valve strives to achieve that set point as
quickly as possible. During pressure control mode, external perturbations such as flow changes and
plasma events will automatically be compensated for by the APC, IQA or IQD controller module so that
the pressure set-point is maintained.
Part # LIT-TSS-O Contact Nor-Cal Intellisys™ Customer Support
Rev 260805.doc
at 800-824-4166 ext. 186 or via the web at http:/www.n-c.com
Nor-Cal
TSS-series
Valve
Normal Operation: After the initialization sequence is complete normal
operation of the TSS control valve is possible. There are two primary modes of
operation, a) position control mode and b) pressure control mode.
in Position control mode the valve will move to any position in its range based
on a position set-point command from the host. The valve will remain in that
position until instructed to do otherwise. Position control mode can be use-
ful in certain cases where pre-determined amount of baffling or throttling is
necessary.
Pressure control mode, on the other hand, is used whenever control to a spe-
cific system pressure level is desired. The host provides the set-point value and
the throttle valve strives to achieve that set point as quickly as possible. During
pressure control mode, external perturbations such as flow changes and
plasma events will automatically be compensated for by the APC, iQA or iQD
controller module so that the pressure set-point is maintained.
Tuning: All Nor-Cal controller modules contain an Adaptive Pressure Control
Algorithm that has been designed to work over a wide range of flow- and
pressure-combinations. There are therefore no “learn modes” to execute, nor
does the user have to set PiD parameters. in some instances, however, vacu-
um system design may affect the closed loop pressure control time constants.
As a result, pressure control performance may at times be affected. if satisfac-
tory pressure control cannot be achieved with the Adaptive Pressure Control
Algorithm, please contact Nor-Cal Products intellisys Customer Support.