Nor-Cal Intellisys TSS - Manual (Page 9)

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TSS-OP-LiT 08/11
5.0 - product Support
TSS Valve Service and maintenance Intervals: The TSS valve was designed for long life and high reliability and, in clean environments, have been shown to
operate with a MTBF well in excess of a year of typical vacuum processing. Process chemistry, temperature and type of use do however affect the moving parts
of the valve and hence the necessary service interval. Therefore Nor-Cal Products recommends inspecting and servicing the valve on a regular basis to avoid
unexpected failures. Please refer to Table 5.1 for recommendations on TSS-series preventive maintenance and service.
TAbLE 5.1 – RECOmmENDED TSS-SERIES pREVENTIVE mAINTENANCE ACTIONS AND INTERVALS
recommenDeD actIon PurPoSe / What to look For recommenDeD InterVal
With valve still installed in system and operating
normally,
visually inspect the rotary indicator disk and
drive assembly.
Rotary position indicator disk may give early indica-
tions of mechanism hang-ups, especially if observed
movement is more erratic than typical. The motor
drive assembly may move back-and-forth slightly if
too much friction is present in the valve assembly
– also an early indicator of mechanism hang-ups
Weekly to monthly, initially, until a process specific service
interval has been determined for the valve.
Remove TSS control valve from system for visual inspec-
tion. Look for process build-up. Also, inspect for areas
showing scratches in or near gate tracks. The latter
can be a sign of gate misalignment or roller wear. Monthly, initially, until a process specific service interval has
been determined for the valve.
With controller power OFF , remove TSS motor drive
unit and inspect Oldham coupling disk (valve body can
remain installed in vacuum system)
inspect for Oldham coupling disk wear and fit. The
presence of a whitish powder indicates disk wear.
Also, the disk should fit snugly on each of the two
hubs, and remain on even when upside down.
After 3 months of use, and then every 3 months, until a
process specific service interval has been determined.
Remove TSS control valve from system and perform leak
check across the seat and/or to atmosphere.
Determine loss of seal integrity due to process
buildup or degradation due to chemical or thermal
attack. All new valves are tested to 1  10-9 atm•scc/
sec He (Viton® seals)
Every 6 months, unless extremely high temperatures or
highly aggressive chemicals are used.
Disassemble valve body to access gate assembly, bear-
ings and O-rings. Replace seals, re-lubricate and clean
as necessary
High vacuum grease used in bearings and seals can
gradually disappear due to evaporation or chemical
attack. The O-ring seals can wear or crack due to
contamination, chemical attack or excessive heat.
Process residue can accumulate in gate tracks and
rollers, either leading to increased particle genera-
tion or ultimate seizing of the assembly. In heated or chemically aggressive applications:
after 6 months of continuous use.
In low temperature and inert applications: after 12
months of continuous use. Or, whenever a leak is found via
leak detection.