Brooks Instrument 3600 Series - Manual (Page 15)

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Section 1 Introduction Installation and Operation Manual
X-VA-MT3600-eng
Part Number: 541B075AAG
February, 2011
Models MT3600, MT3601 & MT3602
Figure 1-5 MT3602 with Alarm and Standard Valve on Inlet Dimensions
Ref. No. KR-3602-191
Figure 1-6 MT3602 with Alarm and Standard Valve on Outlet Dimensions
Ref. No. KR-3602-192