Brooks Instrument 3600 Series - Manual (Page 31)

5-1
Section 5 Parts List Installation and Operation Manual
X-VA-MT3600-eng
Part Number: 541B075AAG
February, 2011
Models MT3600, MT3601 & MT3602
5-1 General
When ordering parts, please specify:
• Brooks Serial Number
• Model Number
• Part Description
• Quantity
(Refer to Figure 5-1 and Table 5-1).