Figure 3-1: 9600 compressor installation flowchart, Supply and return water line connections, Ti cryogenics – Olicom 9600 User Manual
Page 25
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Installation
3-2
P/N 8040540
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Figure 3-1: 9600 Compressor Installation Flowchart
Supply and Return Water Line Connections
(refer to page 3-3)
Electrical Connections
(refer to page 3-4)
Phase Check
(refer to page 3-6)
Single Cryopump Connections
(refer to page 3-9)
START
Refer to
Section 4 - Operation
END
Single or Multiple
Cryopump
Installation?
Multiple Cryopump Connections
(refer to page 3-11)
Connect/Disconnect Helium Flexlines
(refer to page 3-7)
2Ø or 3Ø Cryopump
Power?
(refer to page 3-7)
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