Single cryo-torr cryopump connections, Caution, Helium supply – Olicom 9600 User Manual

Page 33: Figure 3-5: single cryo-torr cryopump installation, Single cryo-torr cryopump connections -10, Ti cryogenics

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Installation

3-10

P/N 8040540

C

HELIX TECHNOLOGY CORPORATION

-

TI

CRYOGENICS

Single Cryo-Torr Cryopump Connections

CAUTION

Make sure the Compressor power is OFF before making any
connections to the rear panel.

1. Connect the Supply and Return lines to the 9600 Compressor as

described in Connecting/Disconnecting Helium Flex Lines
within this section.

2. Connect one end of the Cryopump cold head cable to the

CRYOPUMP ELECTRICAL OUTLET on the rear panel of the
Compressor as shown in Figure 3-5. Connect the opposite end of
the cold head cable to the cryopump cold head cable connector as
shown in Figure 3-5.

Figure 3-5: Single Cryo-Torr Cryopump Installation

HELIUM SUPPLY

HELIUM RETURN

WATER

POWER

CRYO-TORR

POWER CABLE

REMOTE

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