Brooks Instrument SLA5810/20 - Manual (Page 8)

1-2
Models SLA5810 and SLA5820
Section 1 Introduction Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
This flexibility yields products for pressure measurement and control, using
either traditional analog connections or leading edge network-communication
protocols.
Brooks SLA5800 Series of controllers can directly replace existing analog
products with the advantage of improved digital accuracy. Both analog and
digital applications will see settling time and accuracy improvements.
1-4 Specifications
PERFORMANCE CHARACTERISTICS:
Flow Ranges*
Models SLA5810/SLA5820 - Any FS range from 0-3 sccm to 0-30 slpm (N
2
eq.)
*Standard: 0°C and 101kPa (760 Torr).
Accuracy
Integral Pressure products: ±0.5% of F.S. including linearity and hysteresis
Repeatability
Integral Pressure products: ±0.1% of F.S.
RATINGS:
Temperature Sensitivity
Integral Pressure products: ±0.1% of F.S. per °C
Zero Stability
Integral Pressure products: ±0.001% of FS per 30 days
Pressure Ratings:
Maximum Pressure: 1450 psia
(Optional)Maximum Pressure: 4350 psia
All devices pressure tested without fittings to a minimum of 1.5 times the transducer
pressure rating.
Transducer Pressure Ratings:
21.75 psia for 0 - 14.5 psia full scale
108.5 psia for 14.5 - 72.5 psia full scale
435 psia for 72.5 - 290 psia full scale
1450 psia for 290 - 1450 psia full scale
4350 psia for 1450 - 4350 psia full scale
Pressure Equipment Directive (PED) 97/23/EC:
Equipment falls under Sound Engineering Practice (SEP)