INFICON Ecotec E3000 Multigas-Sniffer-Leak Detector Interface description User Manual

Page 21

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3 RS-232 interface

21

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:TURBO

operating hours turbo pump [h]

R

*MEASure

R

:Argon

R

:Current

current for Argon [A]

R

:Position

mass position for Argon [amu]

R

:FLOW

actual flow [sccm]

R

:GLOBal

I•Guide trigger level of global leak rate exceeded

(Gas A / B

 2 values)

R

:POInt no

I•Guide measuring value [in selected unit] for
measuring point no (1, 2,…)

(Gas A / B

 2 values)

R

[TIMEstamp <no>] with date and time

(Gas A / B

 2 values)

R

:Pressure

R

:FOREline

foreline pressure [in selected unit of measurement]

R

:TOTal

total pressure (Transpector) [Torr]

R

:TEMPeratur

R

:Electronic

electronics temp. [°C]

R

:Leak

ECO-Check temp. [°C]

R

:Tsp

Transpector temp. [°C]

R

:TspMIN

Transpector temp. minimum [°C]

R

:TspMAX

Transpector temp. maximum [°C]

R

:TCElectronic

temperature of the turbo controller electronic

R

:TCBearing

temperature of the turbo pump bearings

R

:TCMotor

temperature of the turbo pump motor

R

:TCPump

temperature of the turbo pump

R

:TURBO

R

:Current

current of TMP [A]

R

:Frequency

frequency of TMP [Hz]

R

:Power

power of TMP [W]

R

:Voltage

voltage of TMP [V]

R

*PROGram

I•Guide

:1

:2

:10

use of I•Guide: Program number

without a number the current program is used

-

:ENABle

enable (ON, OFF) (will be added to list of selectable
program when ON)

R/S

:GAS

:GASA

Gas name (A)

(read only, determined by gas number)

R

:GASB

Gas name B

(read only, determined by Gas num B)

R

:MEAStime

Measuring time [s] (1.0, 1.1, … 25.0)

R/S

Table 11: List of commands, ASCII (cont.)

Command

word1

Command

word2

Command

word3

Statement

Read/Set

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