INFICON STM-1 Thin Film Deposition Monitor - Manual (Page 10)

Quality monitor: Monitors the quality of the deposition system by dividing the rate error (XtalRate_F-RateReq) by the
requested rate and multiplying by 100, then taking the absolute value to determine a percent error: |(((XtalRate_F-RateReq)/
RateReq)*100)|. The percent error is then broken up into ten categories:
Quality category (XtalQual)
% Error
0 0.0 – 4.9999
1 5.0 – 7.4999
2 7.5 – 9.9999
3 10.0 - 12.4999
4 12.5 - 14.9999
5 15.0 - 19.9999
6 20.0 - 24.9999
7 25.0 - 29.9999
8 30.0 - 39.9999
9 40.0 and up
Stability monitor: Monitors the frequency stability of the crystal. Single-measurement positive frequency hops are detected, and
all positive frequency hops are accumulated. This data is then broken into ten categories:
Stability category (XtalStab)
Single measurement pos delta Accumulated positive deltas
0 <25 Hz <25Hz
1 25 Hz 25 Hz
2 50 Hz 100 Hz
3 100 Hz 101 Hz
4 100 Hz 200 Hz
5 200 Hz 201 Hz
6 400 Hz 400 Hz
7 600 Hz 600 Hz
8 1000 Hz 1000 Hz
9 1000 Hz 5000 Hz
2.2.3 Utilities Group:
Some members of this group can be updated and others are query only.
Record#
(dec/hex/ASCII) Name Type Description
48/30/0 Endiansel Uchar Query only. Endian select. See note 2.9.
49/31/1 Frmwrchsum Uint Query only. Firmware Checksum. (Build).
50/32/2 CH1_OPS XtalOP_class Semaphore record. See note 2.10.
51/33/3 CH1_CPY CPY_CFG_OP_class Semaphore record. See notes 2.10 and 2.11.
52/34/4 Serial Number Ulong Query only. STM1’s factory programmed serial number
53/35/5 Build type Uint Query only. STM1’s factory programmed build type.
54/36/6 Aout_wdog Uchar Analog output watchdog timeout, in seconds. (0-255)
55/37/7 Aout_value Uint Analog ouput value. 0-4095 is 0-10 V nominal.
XtalOP_class (single byte)
D7 D6 D5
D4 D3 D2 D1 D0
X X Clear serial
number to
Srlno = 0
Clear error to
XtalStat = 0 Clear rate
filter Clear stability info
XtalStab = 0
XtalStabPeak = 0 Clear quality info
XtalQual = 0
XtalQualPeak = 0 Zero thickness
XtalThick = 0
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