INFICON STM-1 Thin Film Deposition Monitor - Manual (Page 14)

3.6 Z-Factor Determination
A list of Z-Factor values may be found in the Material Reference Table in Section 4.9. For other materials Z-Factor may be
calculated by the following formula:
Z - Factor =
Dq Uq
Df Uf
1
2
•
• 
 

where:
Dq = Density Of Quartz
Uq = Shear Modulus Of Quartz
Df = Density Of Film
Uf = Shear Modulus Of Film
The density and shear modulus values may be found in many material reference handbooks.
Z-Factor values are typically very close to bulk values. High stress materials seem to have values slightly lower than expected.
3.7 Tooling Determination
Place a substrate in the normal holder location and deposit a film of approximately 5000 Angstroms using
either bulk or calibrated density and Z-Factor values. Make sure that when doing this calibration the tooling
is set to 1.00. Measure the substrate film thickness as in the density calibration method and determine the
correct Tooling Factor value by the following formula:
Tooling = (Substrate Thickness / Displayed Thickness)
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