INFICON STM-1 Thin Film Deposition Monitor - Manual (Page 16)

Material Symbol Bulk Density Z Factor
gm/CC
Mercury
Hg 13.46 0.740
Molybdenum Mo 10.2 0.257
Neodynium Fluoride NdF3 6.506 --------
Neodynium Oxide Nd2O3 7.24 --------
Nickel Ni 8.91 0.331
Niobium Nb 8.57 0.493
Niobium (V) Oxide Nb2O5 4.47 --------
Palladium Pd 12.0 0.357
Platinum Pt 21.4 0.245
Potassium Chloride KCl 1.98 2.050
Rhenium Re 21.04 0.150
Rhodium Rh 12.41 0.210
Rubidium Rb 1.53 2.540
Samarium Sm 7.54 0.890
Scandium Sc 3.00 0.910
Selenium Se 4.82 0.864
Silicon Si 2.32 0.712
Silicon (II) Oxide SiO 2.13 0.870
Silicon Dioxide SiO2 2.20 1.070
Silver Ag 10.5 0.529
Silver Bromide AgBr 6.47 1.180
Silver Chloride AgCl 5.56 1.320
Sodium Na 0.97 4.800
Sodium Chloride NaCl 2.17 1.570
Sulfur S 2.07 2.290
Tantalum Ta 16.6 0.262
Tantalum (IV) Oxide Ta2O5 8.20 0.300
Tellurium Te 6.25 0.900
Terbium Tb 8.27 0.660
Thallium Tl 11.85 1.550
Thorium (IV) Fluoride ThF4 6.32 --------
Tin Sn 7.30 0.724
Titanium Ti 4.50 0.628
Titanium (IV) Oxide TiO2 4.26 0.400
Titanium Oxide TiO 4.90 --------
Tungsten W 19.3 0.163
Tungsten Carbide WC 15.6 0.151
Uranium U 18.7 0.238
Vanadium V 5.96 0.530
Ytterbium Yb 6.98 1.130
Yttrium Y 4.34 0.835
Yttrium Oxide Y2O3 5.01 --------
Zinc Zn 7.04 0.514
Zinc Oxide ZnO 5.61 0.556
Zinc Selenide ZnSe 5.26 0.722
Zinc Sulfide ZnS 4.09 0.775
Zirconium Zr 6.51 0.600
Zirconium Oxide ZrO2 5.6 --------
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