INFICON STM-1 Thin Film Deposition Monitor User Manual

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Warranty ......................................................................................................................................................... 1

SYCON INSTRUMENTS, INC.................................................................................................................................................. 1

EQUIPMENT RETURN ............................................................................................................................................................. 1

1. Hardware ..................................................................................................................................................... 3

1.1 Specifications: ....................................................................................................................................................................... 3

1.2 Connections:.......................................................................................................................................................................... 3

1.3 Dipswitch Settings:................................................................................................................................................................ 3

1.4 Status/Communication LEDs ................................................................................................................................................ 4

2. Communications ......................................................................................................................................... 5

2.1 Protocol Structure:................................................................................................................................................................. 5

2.2 Data Access: .......................................................................................................................................................................... 7

2.2.2 Run Time Data Group: ....................................................................................................................................................... 9

2.2.3 Utilities Group:................................................................................................................................................................. 10

2.2.4 Analog Output: ................................................................................................................................................................. 11

2.2.5 Firmware Version............................................................................................................................................................. 11

2.3 Forming the Data Field:....................................................................................................................................................... 12

3. Calibration and Theory............................................................................................................................ 13

3.1 Measurement Theory........................................................................................................................................................... 13

3.2 Rate Computation................................................................................................................................................................ 13

3.3 Thickness Reading Calibration............................................................................................................................................ 13

3.4 Density Determination......................................................................................................................................................... 13

3.5 Density................................................................................................................................................................................. 13

3.6 Z-Factor Determination ....................................................................................................................................................... 14

3.7 Tooling Determination ........................................................................................................................................................ 14
















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