INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 42)

Chapter 3 Menus
3-5
Each layer consists of a film (i.e. a material), plus the deposition rate and thickness that
are desired for this layer. The Layer Edit Menu provides access to these layer
parameters:
Fnl T hk
T hickn ess Lim it
S tart M ode
R am p 1
S tart T hkness
R am p T im e
N ew R ate
R am p 2 D isabled
99.0
0:1 0:00
4.500
E nabled
M anu al
0.0 00
9.0 00
E n /D is
A /s
h:m m :ss
kA
E n /D is
A uto/M a n.
A
kA
R A T E (A /s)
0.0
E d it L a yer M en u
E xit to
M ain
P rev
M en u
E d it
T H IC K N E S S (kA )
0.000
P O W E R ( % )
0.0
M y P rocess 2 -> L ayer 2 -> A lum inum O xide
P aram eter V alue U nits
Init R a te 9.9 A /s
T im e S etpoint 0:0 0:00 h:m m :ss
Exit to Main Returns to the Main Menu.
Prev Menu Returns to the Layer Select Menu.
Edit Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.
Control Knob Scrolls through the list of layer parameters.