INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 60)

Appendix
Source
Number of Sources
Control Voltage
Resolution
2
0 to ±10V into 2k
Ω
load
15 bits
Digital I/O
Digital Inputs
Functions
Input Rating
Relay Outputs
Functions
Relay Rating
8
Shutter, Thickness Setpoint,
Time Setpoint, All Crystal Fail
5VDC, non-isolated
8
Source Shutter, Close Shutter,
Zero Thickness, Zero Time
30Vrms or 30VDC, 2A maximum
General Specifications
Mains Power Supply
Power Consumption
Operating & Transportation
Environment
Storage Environment
Rack Dimensions (HxWxD)
Weight
100-120/200-240~, ±10% nominal
50/60HZ
25W
0
°C to 50°C
0 to 80% RH non-condensing
0 to 2,000 meters
Indoor Use Only
Class 1 Equipment (Grounded Type)
Suitable for Continuous Operation
Ordinary Protection (not protected
against harmful ingress of moisture)
Pollution Degree II
Installation (Overvoltage) Category II
for transient overvoltages
-40
°C to 70°C
88.5mm x 212.7mm x 196.9mm
13.2 kg (6 lbs)
Display
Graphs
Rate, Deviation, Power
Readouts Thickness, Rate, Power
Process Parameters (a Process is a sequence of layers)
# Processes
25
# Films 25
# Layers (total all processes) 250
Layer Parameters (Layer is a Film, plus these values)
Initial Rate
0.0 to 999.9
Å/sec.
Final Thickness 0.0 to 999.9
Å
Time Setpoint 0 to 30000 sec.
Thickness Limit 0.0 to 999.9
Å
Start Mode Auto/Manual