INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 8)

Chapter 1 Quick Start
1-7
1.3 Rear Panel
Rear Panel Connections
Sensor 1 & 2 Connects to quartz crystal sensor remote oscillator.
Output 1 & 2 Connects the SQC-122 output to your evaporation supply
control input.
Option A Card Provides an additional four sensor measurement channels.
See Chapter 4 for information on installing the four sensor
option card.
Relay I/O (1-4)
Relay I/O (5-8) Connects 8 relays and 8 digital inputs to external equipment for
process control. See Appendix C for connections.
RS-232 Connects to computer for programming and data acquisition.
Measurement ground terminal useful for common system and
cable grounding.
Power Input and
Voltage Selector W ARNING : Select 115V for 100-120VAC, 230V for 200-
240VAC.
W ARNING : Use removable power cords only of the specified
type and rating, attached to a properly grounded receptacle.
S e n s o r 1 S e n s o r 2
R S -2 3 2
O p tio n A C a rd O p tio n B C a rd
S ig m a
Σ
in s tru m e n ts
M a n u fa c tu re d B y
O u tp u t 1 O u tp u t 2 R e la y I/O 1 -4 R e la y I/O 5 -8
1 0 0 -1 2 0 /2 0 0 -2 4 0 V ~
5 0 /6 0 H z
2 5 V A
F u s e : 2 5 0 V , .5 A S B