Appendix – INFICON SQC-122 Thin Film Deposition Controller Operating Manual User Manual
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Appendix
# Rate Ramps
2
Rate Ramp Start
0.0 to 999.9
Å
Rate Ramp Time
0 to 1000 sec.
New Rate
0.0 to 999.9
Å/sec
Film Parameters (Film is a Material, plus these values)
Material
100 stored
Density
0.40 to 99.99 gm/cm
3
Z Factor
0.100 to 9.900
P Term
1 to 9999
I Term
0 to 99.9 sec.
D Term
0 to 99.9 sec.
Sensor (1,2)
On/Off
Output
1 or 2
Max Power
0.0 to 100.0 %
Slew Rate
0.0 to 100.0 %/sec.
Ramp Time (1,2)
0 to 30000 sec.
Soak Power (1,2)
0.0 to 100.0 %
Soak Time (1,2)
0 to 30000 sec.
Feed Ramp Time
0 to 30000 sec.
Feed Power
0.0 to 100.0 %
Feed Time
0 to 30000 sec.
Idle Ramp Time
0 to 30000 sec.
Idle Power
0.0 to 100.0 %
Shutter Delay Time
0 to 200 sec.
Shutter Delay Error
0.0 to 30.0 %
Control Error
Ignore/Stop/Hold
Control Error Setting
0 to 30.0 %
Rate Sampling
Continuous/Time/Accuracy
Sample Time
10.0 to 999.0 sec.
Hold Time
10.0 to 999.0 sec.