INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 51)

Chapter 3 Menus
3-5
3.6 System Parameters Menu
The System Parameters Menu contains settings that affect the basic operation of the
SQC-122. System parameters generally pertain to the physical setup of your vacuum
system equipment.
S ystem Tooling
Xtal Tool 2
S im ulate M ode
M in Frequency
M ax Frequency
S cale 1
S cale 2
C ontrast
D ev G raph Lim it 20.0
1.5
2.6
2.5
6.0e+06
5.0e+06
O ff
100
100
V olts
H z
H z
O n/O ff
%
%
R A T E(A /s)
0.0
E dit S ystem P aram s M enu
I / O
S etup
E xit to
M ain
E dit
T H IC K N E S S (kA )
0.000
P O W E R ( % )
0.0
M y Process 1 -> Layer 1 -> Alum inum
P aram eter V alue U nits
P eriod .25 S ec
Xtal Tool 1 100 %
%
V olts
Exit to Main Returns to the Main Menu.
Edit Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.
I / O Setup Displays menu for mapping of inputs and outputs.
Control Knob Scrolls through the list of system parameters.