Sigma – INFICON SQC-122 Thin Film Deposition Controller Communications Manual User Manual
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Sigma
instruments
int
Tooling
film tooling factor
char
Name[16]
film name
Material Data
single
Density
material density (gm/cc)
single
ZFactor
material z factor
char
MatName[16]
material name
InOut Data
Int
Io(8)
122Sys Data
double Period
measurement period (sec.)
int
SysTool
system tooling
int
Xtool(1)
individual sensor tooling
int
SimMode
simulation mode (1 = on)
double FMin
minimum frequency
double FMax
maximum frequency
double PwrScale(1)
double RateDev
Measurement Data
double TimeStamp
time relative to start time data was acquired
double AvgRate
average rate
double AvgThick
average thickness
double Power(1)
average power
double ChRate(5)
up to six individual channels of rate
double
ChThick(5)
up to six individual channels of thickness
double ChFreq(5)
up to six individual channels of frequency