Sigma – INFICON SQC-122 Thin Film Deposition Controller Communications Manual User Manual
Page 5

1318 Duff Drive
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Fort Collins, Colorado 80524
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(970) 416-9660
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Fax (970) 416-9330
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Sigma
instruments
Example:
T
A
Zeroes time display on unit.
Command:
U
Parameters: 0 to 33
Description: Controls operation of the SQC-122.
0 = Start Process
6 = Start Process 1
1 = Stop Process
7 = Start Process 2
2 = Start Layer
8-30 = Start Process 3-25
3 = Stop Layer
31 = Soak Hold
4 = Start Next Layer
32 = Zero Thickness
5 = Force Final Thickness
33 = Zero Time
Example:
U1
A
Starts the first layer of the active process.
Command:
V
Parameters: None
Description: Controls operation of the SQC-122.
0 = Stopped
8 = Soak 2
16 = Start Next Layer
1 = Crystal Verify
9 = Soak Hold
17 = Crystal Fail
2 = Initialize layer
10 = Shutter Delay
18 = Stop Layer
3 = Manual Start Layer
11 = Deposit
19 = Manual Power
4 = Pocket Rotate
12 = Rate Ramp
5 = Ramp 1
13 = Rate Ramp Deposit
6 = Soak 1
14 = Timed Power
7 = Ramp 2
15 = Idle Ramp
Example:
U1
A9
Units is in Soak Hold phase.
Command:
Y
Parameters: None.
Description: Read the Power-Up Reset flag. The Power-Up Reset flag is set during
boot-up of the unit and stays set until read through the RS-232 interface.