Sigma – INFICON SQC-122 Thin Film Deposition Controller Communications Manual User Manual
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instruments
Character. See the code example in the SQM-TERM.C file for an example of managing
the CRC.
These examples represent the data in unpacked format to better illustrate the function of
the specific commands.
Command:
@
Parameters: None
Description: Returns the model number and software version number.
Example:
@
SQC122 Ver 1.2
Command:
L
Parameters: [1..2]
Description: Read the current Rate for a channel.
Example:
L1
A9.32
Channel one’s rate is 9.32 Angstroms/S
Command:
M
Parameters: None.
Description: Read the current Average Rate.
Example:
M
A10.42
Average Rate is 10.42 Angstroms/S
Command:
N
Parameters: [1..2]
Description: Read the current thickness for a channel.
Example:
N2
A1.187
Channel two’s Thickness is 1.187 Kilo Angstroms.