Sigma – INFICON SQC-122 Thin Film Deposition Controller Communications Manual User Manual

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Fort Collins, Colorado 80524

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(970) 416-9660

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Fax (970) 416-9330

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Sigma

instruments

Character. See the code example in the SQM-TERM.C file for an example of managing
the CRC.

These examples represent the data in unpacked format to better illustrate the function of
the specific commands.

Command:

@

Parameters: None

Description: Returns the model number and software version number.

Example:

@

SQC122 Ver 1.2

Command:

L

Parameters: [1..2]

Description: Read the current Rate for a channel.

Example:

L1

A9.32

Channel one’s rate is 9.32 Angstroms/S

Command:

M

Parameters: None.

Description: Read the current Average Rate.

Example:

M

A10.42

Average Rate is 10.42 Angstroms/S

Command:

N

Parameters: [1..2]

Description: Read the current thickness for a channel.

Example:

N2

A1.187

Channel two’s Thickness is 1.187 Kilo Angstroms.

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