Sigma – INFICON SQC-122 Thin Film Deposition Controller Communications Manual User Manual

Page 4

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1318 Duff Drive

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Fort Collins, Colorado 80524

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(970) 416-9660

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Fax (970) 416-9330

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Sigma

instruments

Command:

O

Parameters: None.

Description: Read the current Average Thickness

Example:

O

A2.376

The current Average Thickness is 2.376 kilo

Angstroms.

Command:

P

Parameters: [1..2

Description: Read the current Frequency for a channel.

Example:

P2

A5701563.2 Channel two’s current Frequency 5701563.2Hz

Command:

R

Parameters: [1..2]

Description: Read the Crystal Life for a channel.

Example:

R2

A57.82

Channel two’s remaining life is 57.82%.

Command:

S

Parameters: None.

Description: Zero Average Thickness and Rate.

Example:

S

A

Command:

T

Parameters: None.

Description: Zero Time

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