1 measurement system check, Figure 5-8 – INFICON Front Load Single Sensor User Manual

Page 87

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Front Load Single and Dual Sensors Operating Manual

Figure 5-8 Crystal Sensor Emulator attachment points

5.1.3.1 Measurement System Check

1

Refer to

Figure 5-8

. Remove the 15.2 cm (6 in.) BNC cable from the

feedthrough at point A.

2

Connect the Crystal Sensor Emulator to the 15.2 cm (6 in.) BNC cable
at point A.

If the Crystal Fail message disappears after approximately five seconds,
the sensor or feedthrough is the cause of the Crystal Fail. Reinstall the 15.2
cm (6 in.) BNC cable to the feedthrough and proceed to

section 5.1.3.2

.

If the Crystal Fail message remains, the controller / monitor, or XIU /
oscillator, or their associated cables are the cause of the Crystal Fail. Refer
to the controller or monitor operating manual for troubleshooting
information.

Thin Film

Controller

Crystal Interface

Unit (Oscillator)

Sensor Head

A

In-Vacuum

C

cable

B

Crystal

Holder

BNC

Cable

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