3 cleaning mpg401, replacing parts – INFICON MPG40x ATM to Ultra-High Vacuum Gauge User Manual

Page 21

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tina48e1-b (2008-10) MPG400-401.om

21

If possible perform a leak test (leak rate <10

-9

mbar l/s).

WARNING

WARNING: electric arcing
Helium may cause electric arcing with detrimental effects on
the electronics of the product.
Before performing any tightness tests put the product out of
operation and remove the electronics unit.

Mount the magnet unit (4) and lock it with the screw (3).

Carefully mount the electronics unit (2). (Make sure the pin of the Pirani ele-
ment is properly plugged into the corresponding hole of the electronics unit.)

Push the electronics unit up to the mechanical stop and lock it with the
hexagon socket set screw (1).

Adjust the gauge (

→ 16).



DANGER

DANGER: cleaning agents
Cleaning agents can be detrimental to health and environment.
Adhere to the relevant regulations and take the necessary precautions
when handling cleaning agents and disposing of them. Consider
possible reactions with the product materials (

→ 7).

For cleaning the measuring chamber, the Pirani element must be

removed and replaced.

• Allen wrench AF 1.5
• Allen wrench AF 3
• Open-end wrench AF 6
• Open-end wrench AF 7
• Pliers for circlip
• Polishing cloth (400 grain) or Scotch-Brite
• Tweezers
• Cleaning

alcohol

• Mounting tool for ignition aid
• Ignition

aid

• Metal seal (11) for anode feedthrough
• Pirani element (13) incl. set of seals (13a, 13b)


6.3 Cleaning MPG401,

Replacing Parts

Tools / material required

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