INFICON Spot CDS550D User Manual
INFICON Equipment
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Research & Development
SPOT CDS500D & CDS550D OEM Sensor SPI-Interface Specification_V1.1
Page 1 of 14
Christian Berg, T based on Felix Mullis, TL
Created 11/10/2014 2:36:00 PM
SPI-Interface
Specifications
for SPOT
CDS500D & CDS550D
OEM
Capacitance Diaphragm
Sensors
V 1.1
November 10, 2014
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