Tweco GCM-6000 Gas Control - Manual (Page 41)

Manual 0-2641 35 APPENDIX
APPENDIX I: TIMING CHARTS OF GAS SEQUENCES
A-01801
PILOT SET PLASMA SET SEC SET
SOL1 Plasma
SOL2 Pre-Flow N2
SOL3 Cut-flow O
2
SOL4 Secondary
Start
PREFLOW CUT POSTFLOW
Transfer Stop Pilot
PILOT SET PLASMA SET SEC SET
SOL1 Plasma
SOL2 Pre-Flow N2
SOL3 Cut-flow
SOL4 Secondary
Start
PREFLOW CUT POSTFLOW
Transfer Stop Pilot
Merlin 6000GST Gas Sequence Using O
2
(Oxygen) Plasma
Merlin 6000GST Gas Sequence All Gases Except O
2
(Oxygen) Plasma
Solenoid OFF
Solenoid ON