Trebor Quantum Series Di Water Heater - Manual (Page 3)

QUANTUM DI HEATER OPERATION / MAINTENANCE MANUAL PAGE 3
1 INTRODUCTION
QUANTUM DI WATER HEATER
TREBOR’s Quantum deionized water heater will meet your most stringent
application requirements for process cleanliness and temperature control.
Our unique heater design virtually eliminates the potential for metal
contamination due to potentially exposed metal heating elements in
immersion style heaters, while process control and reliability are designed
to outperform and outlast other available quartz heating systems.
Trebor’s DI water heater uses a revolutionary heating technology to
provide exceptional process purity and control. Heat is generated using
resistive heating elements conducted to the fluid through quartz tubes
using convective heat transfer. This conductive / convective heating
method allows the heating element to operate at a much cooler
temperature than IR heating systems and provides the basis for a
responsive heating control system.
The Quantum heater modules have smooth surfaces with minimal cracks
and crevices, reducing particle traps. Furthermore, no pipe threads or
elastomeric O-rings are used. With the exception of the exposed tip of
the titanium temperature sensor (included with the fast response option),
the DI water is exposed only semiconductor grade quartz, PTFE, and
PFA wetted surfaces.
Trebor’s patented heating module technology is constructed to provide
excellent process control by minimizing hold-up volume and thermal heat
capacitance while maximizing the heat transfer. While heating, the
system can ramp to a process temperature in a “no flow” condition. The
ability to withstand these extreme transient conditions allows the heater to
operate without the need of flow monitors or flow switches to protect the
heaters. This also reduces the consumption of DI water by minimizing
temperature transition time and bypass to drain requirements.
Many product safety features have been incorporated into the Quantum
heater. Each system has a liquid level sensor, leak sensor, grounded
heater modules, ground fault protection, and redundant control system
interlocks. An electro-mechanical contactor disengages power to the
heaters when a fault condition occurs.
This equipment is built and certified to semiconductor manufacturing
industry requirements of SEMI S2-0703. Please contact Trebor
regarding any questions.
Conformity of the equipment with the above guidelines is attested by the
TUV certification mark.
This equipment complies with the requirements of the EU guidelines: