Brooks Instrument 5861E - Manual (Page 12)

2-4
Model 5861E
Section 2 Installation Installation and Operation Manual
X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008
Recommended installation procedures:
a. The Model 5861E should be located in a clean dry atmosphere
relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
When used with a reactive (sometimes toxic) gas, contamination or
corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
meter purged with dry Nitrogen before use.
d. The Model 5861E Mass Flowmeter can be installed in any position.
However mounting orientations other than the original factory
calibration (see data sheet) will result in a ±0.5% maximum full scale
shift after re-zeroing.
e. When installing Flowmeters, be aware that sharp abrupt angles in
the system piping directly upstream of the controller may cause a
small shift in accuracy. If possible have at least 10 pipe diameters of
straight tubing upstream of the Model 5861E Mass Flowmeter.
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Maximum Flow Rate Recommended Filter Size
10-30slpm 15 micron
Above 30 slpm 30 micron
Note: The above lists the maximum recommended porosity for each flow
range. It is recommended that the minimum micron porosity that does not
limit the full scale flowrate be used.