Brooks Instrument 5861E - Manual (Page 31)

4-11
Model 5861E
Section 4 Maintenance Installation and Operation Manual
X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008
Example:
The desired gas is cyanogen
The desired full scale flow rate is 30 slpm.
Sensor conversion factor is 0.498 from Table 4-3.
Nitrogen equivalent flow = 30/0.498 = 60.24 sccm
Table 4-4 Restrictor Selection Guide
Based on 0 0 C Standard Reference Temperature
**For Hydrogen from 130slpm to 200 slpm use 3-60 micron restrictor elements.
Note: If the Nitrogen equivalent flow is between two sizes, choose the larger size.
In the previous example , the restrictor should be sized for a 60.24 slpm
flow rate (P/N S-613-E-528-BMT).
If a restrictor assembly is being replaced because the original has become
contaminated, the original may be used as a guide to select the
replacement assembly.The porosity of the original element or elements is
marked on the calibration sheet whch was shiupped with the flow
controller. The replacement assembly should be replaced in the same
orientatiion as the original restrictor. (Refer to Section 4-4 for assembly
procedure).