Brooks Instrument 5861E - Manual (Page 36)

5-4
Model 5861E
Section 5 Parts List Installation and Operation Manual
X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008
5850 Series Service Tool Kit 5850/5860 Series Break Out Board Assembly
P/N S-778-D-017-AAA P/N S-273-Z-668-AAA for D Connector version
Permits the complete disassembly of the Installs directly between mass flow sensor/
Model 5861E for servicing. controller and interconnecting cable. Allows
convenient access to all signals for easy
Contains: troubleshooting of system.
1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool
1 - Break Out PC Board
1 - Ball Point Allen Wrench 1 - 5 foot Extension Cable
1 - Phillips Screw Driver 1 - Terminal PC Board
1 - Nut Driver for Orifice
1 - Restrictor Removal Tool
1 - Common Screw Driver
5851/5861E Header Removal Tool
P/N S-817-Z-036-AAA
5861E O-ring Kit
P/N S-375-Z-334***
***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=Not Shown
Additional publications available:
MFC Contamination Control
Valve Application Guide/service Manual
Table 5-2 Tool and Spare Part Kits for Model 5861E