Brooks Instrument 5861E - Manual (Page 33)

5-1
Model 5861E
Section 5 Parts List Installation and Operation Manual
X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008
5-1 General
When ordering parts, please specify:
Brooks Serial Number
Model Number
Part Description
Part Number
Quantity
(Refer to Figure 5-1 and Tables 5-1 and 5-2).