Aalborg GFC User Manual
Page 12
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TABLE I GFC 17 LOW FLOW MASS FLOW CONTROLLER*
4.2
Flow Capacities
MODEL
CODE
mL/min [N
2
]
CODE
liters/min [N
2
]
17
01
10
07
1
02
20
08
2
03
50
09
5
04
100
10
10
05
200
06
500
TABLE II GFC 37 MEDIUM FLOW MASS FLOW CONTROLLER*
TABLE III GFC 47/57/67/77 HIGH FLOW MASS FLOW CONTROLLER*
*Flow rates are stated for Nitrogen at STP conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
MODEL
CODE
liters/min [N
2
]
37
11
15
30
20
31
30
32
40
33
50
MODEL
CODE
liters/min [N
2
]
47
40
60
41
80
42
100
57
50
200
67
60
500
77
70
1000
4.1
CE Compliance
GFC Mass Flow Controllers are in compliance with CE test standards stated
below:
EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991,
Group 1, Class B Immunity Standard: EN 55082-1:1992
FLOW RANGES
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