Aalborg DFC Digital User Manual
Page 12
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FLOW RANGES
TABLE I DFC 26 LOW FLOW MASS FLOW CONTROLLERS*
TABLE II DFC 36 MEDIUM FLOW MASS FLOW CONTROLLERS*
TABLE III DFC 46 HIGH FLOW MASS FLOW CONTROLLERS*
* Flow rates are stated for Nitrogen at STP conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
9
CODE
scc/min [N
2
]
CODE
std liters/min [N
2
]
01
0 to 10
07
0 to 1
02
0 to 20
08
0 to 2
03
0 to 50
09
0 to 5
04
0 to 100
10
0 to 10
05
0 to 200
06
0 to 500
CODE
standard liters/min [N
2
]
11
0 to 15
30
20
31
30
32
40
33
50
CODE
standard liters/min [N
2
]
40
60
41
80
42
100
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