Aalborg DFC Digital User Manual

Page 17

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6.2

Flow Path Cleaning

Before attempting any disassembly of the unit for cleaning, try inspecting the flow
paths by looking into the inlet and outlet ends of the meter for any debris that may
be clogging the flow through the meter. Remove debris as necessary. If the flow
path is not unclogged, then proceed with steps below.

Do not attempt to disassemble the sensor. If blockage of the sensor tube is not
alleviated by flushing through with cleaning fluids, please return meter to Aalborg

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for servicing.

6.2.1

Restrictor Flow Element (RFE)

The Restrictor Flow Element (RFE) is a precision flow divider inside the trans-
ducer, which splits the inlet gas flow by a preset amount to the sensor and main
flow paths. The particular RFE used in a given Mass Flow Controller depends on
the gas and flow range of the instrument.

6.2.2 DFC 26 models

Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.

Carefully disassemble the RFE from the inlet connection. The 50 micron filter
screen will now become visible. Push the screen out through the inlet fitting. Clean
or replace each of the removed parts as necessary. If alcohol is used for clean-
ing, allow time for drying.

Inspect the flow path inside the transducer for any visible signs of contaminants.
If necessary, flush the flow path through with alcohol. Thoroughly dry the flow
paths by flowing clean dry gas through.

Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.

It is advisable that at least one calibration point be checked after re installing the
inlet fitting - see section (7).

6.2.3 DFC 36/46 models

Unscrew the four socket head cap screws (two 10-24 and two 6-32) at the inlet
side of the meter. This will release the short square block containing the inlet com-
pression fitting.

The 60 micron filter screen will now become visible. Remove the screen. DO NOT
remove the RFE inside the flow transducer! Clean or replace each of the removed
parts as necessary. If alcohol is used for cleaning, allow time for drying.

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Note: Overtightening will deform and render the RFE defective.

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