INFICON XTC/C Thin Film Deposition Controller - Manual (Page 110)

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XTC/C - XTC/2 Operating Manual
4.2 State Descriptions and Parameter Limits
Operating the XTC as a film thickness/rate controller requires programing the
film sequence parameters. A film sequence begins with a START command
and ends when the film in process reaches the idle state. Any process control
that occurs between these events is determined by the values programmed in
the possible parameters. A film sequence consists of many possible states, with
a state being defined as one process event. These states are described below;
also, see
Figure 4-2 on page 4-2 . The parameters that affect each state are
listed in brackets at the end of the state description.
Table 4-1 State Descriptions
STATE CONDITION RELAY CONTACT STATUS
Source
Shutter
Sensor
Shutter
Feed
NOTE: 1 through 7 are Pre-Deposit States.
1.READY Will accept a START command. Open Open Open
2.SELECT
CRUCIBLE/SWITCH
CRYSTAL Instrument advances to next state
when "crucible in position" input is
low. If IDLE PWR of previous layer
is not equal to zero, power is set to
zero before crucible position
changes. If a sensor other than the
one last used is selected, then the
switch to that sensor will occur.
[Crucible #, Sensor #, Source #] Open Open Open
3.RISE TIME 1 Source rising to Soak Power 1
level. Rise Time 1] Open Open Open
4.SOAK TIME 1 Source maintained at Soak Power
1 level. [Soak Time 1, Soak Power
1] Open Open Open
5.RISE TIME 2
(feed ramp) Source rising to Soak Power 2
level. [Rise Time 2] Open Open Open
6.SOAK TIME 2
(feed soak) Source maintained at Soak Power
2 level. [Soak Time 2, Soak Power
2] Open Open Closed
7.SOAK HOLD Source maintained at Soak Power
2 level. [Soak Hold Input] Open Open Open
NOTE: 8 through 14 are Deposit states.
8.SHUTTER DELAY Rate control. Advances to Deposit
State once the Source is in Rate
Control within 5% [Shutr Dly Y]
Open Closed Open
9.DEPOSIT Rate control. [Dep Rate, Final Thk,
Ctl Gain, Ctl Tc, Ctl Dt] Closed Closed Open