INFICON XTC/C Thin Film Deposition Controller - Manual (Page 89)

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XTC/C - XTC/2 Operating Manual
3.8.4 Datalogging
The DATALOG data output represents the information concerning the latest
"shutter open" to "shutter close" sequence.
Automatic data logging is enabled by choosing DATALOG for the
communications type, see
section 3.8.1 on page 3-20 . If DATALOG is chosen,
the RS232 port is configured to output the DATALOG information only and
cannot receive commands from a host computer. The IEEE option, if installed,
will continue to work in the normal fashion.
The data is a series of ASCII strings, each separated by a "carriage return and
line feed", in the order below:
1 Layer # (1-3)
2 Film # (1-9)
3 Rate = _ _ _.__Å/s
4 Thickness = _ _ _ _._ _ _ _ kÅ [Last good thickness, if crystal failed]
5 Deposit Time = _ _:_ _ Min:Sec.
6 Average Power = _ _._%
7 Begin Frequency = _ _ _ _ _ _ _._ Hz
8 End Frequency = _ _ _ _ _ _ _._ Hz [negative of last good frequency if crystal fail]
9 Crystal Life = _ _%
10 End on Time Power or Normal Completion
NOTE: In addition—if the Layer is the first one of a process, a preface "Begin
Process" followed by 2 blank lines is output. If the layer is the last one
of the process, a post script "End Process", preceded by 2 blank lines
is output.
Automatic datalogging is available only on the XTC/2; however, the datalog
information string is available via the S19 command for both the XTC/2 and
XTC/C.