INFICON XTC/C Thin Film Deposition Controller User Manual
Page 37
2 - 9
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
F
igure
2-5
Inst
a
llatio
n
Gui
de
Schematic
So
ur
c
e Co
ntr
oll
er
Su
ch
As
El
e
c
tr
o
n
Bea
m G
un
Po
wer
Sup
ply
XIU (
O
sc
illa
tor
)
IPN 7
57-
302
-G
1
Cool
ing
Wa
te
r
Ai
r,
80
PS
I, 1
10
PS
I Max
.
2
4 V(
ac
) or
V(
dc
)
P
o
wer
S
uppl
y
IP
N 007
-1
9
9
S
hut
ter
Sol
enoi
d A
s
s
y.
S
ens
or
Shu
tter
1
[N.O
. Re
lay
Con
tac
t]
S
ens
or
Shu
tter
1
S
ourc
e
Shu
tter 1
[N.O
. Re
lay
Con
tac
t]
S
ourc
e
Shu
tter 1
O
ut
put
s
Pi
n
#
5
6
1
2
Ou
tp
u
ts
S
ourc
e
Sh
utter 2
3
,4
S
ens
or Sh
utter 2
7
,8
S
top
8,10
E
nd O
f P
ro
c
es
s
1
1
,1
2
In
put
s
In
put Co
mmon
13,
14,15
,16,1
7
S
tart Depo
si
tion
18
S
top D
epos
iti
on
19
E
nd De
pos
it
20
S
a
mpl
e In
iti
ate
21
S
a
mpl
e In
hib
it
22
Cry
st
al
Fail
Inh
ibi
t
23
Zero Thi
c
k
n
e
s
s
24
S
oak
2 Ho
ld
25
Pi
n #
Al
so
A
v
ai
la
ble
Ou
tp
u
ts
1,
2
Thi
c
k
ne
ss
se
tpoi
nt
3,
4
F
e
ed
tim
e (SO
AK
2)
5,
6
Cr
y
s
ta
l Fai
l
7,
8
Ala
rm
s
9,
10
Sour
c
e
1 /
Sou
rc
e 2
1
1
,12
E
nd De
pos
it
In
put
s
13
I
nput c
o
m
m
on (
G
ND)
14
Cr
u
c
ib
le
v
a
lid
15
,16,1
7 I
nput c
o
m
m
on (
G
ND)
O
pen
Col
lec
tor
O
utpu
ts
18
Cr
u
c
ib
le
s
e
le
c
t 1
19
Cr
u
c
ib
le
s
e
le
c
t 2
20
Cr
u
c
ib
le
s
e
le
c
t 3
21
Cr
u
c
ib
le
s
e
le
c
t 4
22
Cr
u
c
ib
le
s
e
le
c
t 5
23
Cr
u
c
ib
le
s
e
le
c
t 6
24
Cr
u
c
ib
le
s
e
le
c
t 7
25
Cr
u
c
ib
le
s
e
le
c
t 8
NOTE:
Cr
uc
ib
le
s
e
le
c
t is
al
s
o
BCD e
n
c
o
ded
on
se
nso
r c
onn
ec
tor
1.
Pi
n
#
Des
c
rip
tio
n
1
No
t us
ed
2
T
X
D
Dat
a tran
s
m
itted
from X
T
C
3
RXD
Dat
a
re
c
e
iv
e
d
by
XTC
4
No
t us
ed
5
GND
S
ign
al g
ro
und
6
DTR O
u
tp
ut from X
T
C in
dic
ati
ng rea
dy
t
o
trans
mi
t
7
CTS
Inpu
t to X
T
C in
dic
ati
ng s
top
tr
a
nsm
itti
ng
8
No
t us
ed
9
GND
S
hie
ld g
ro
und
IE
EE
757
-21
1
-G
1
(O
p
tio
nal)
IPN
755-
26
2-
G
1
Ha
nd Hel
d M
anua
l
P
o
we
r Co
n
tro
lle
r
STOP
INCR DECR
X
T
A
L
S
W
I
T
C
H
[T
o fr
ont o
f in
str
ume
nt]
F
rom Lo
cal
Li
ne P
ower
100
-1
20 V
(a
c
) ±
10%
200
-2
40 V
(a
c
) ±
10%
50-
60
Hz
S
tan
dar
d S
ens
or
with
Shu
tter
IPN 7
50-
21
1-
G
2
(O
pti
on)
O
p
ti
ona
l
Ca
jo
n
Co
upl
ing
S
ens
or
S
hutt
er
So
ur
ce to
S
ens
or
10”
M
ini
mum
So
ur
ce
Sh
utter
P
neum
atic
Ac
tuato
r
Ac
tua
tor
P
o
wer
S
uppl
y
Rot
ary
F
eed T
h
ru
Co
mpres
s
ed
Ai
r
F
eed T
hr
u
IPN 750-
030
-G
1
(O
pti
on)
(O
scilla
tor Ki
t 757-3
05-GX
X: opti
on)
O
p
ti
ona
l
Ch
art
Re
c
o
rde
r
Ea
rt
h
Gr
ou
nd
Ou
t
In
Op
ti
o
n