INFICON XTC/C Thin Film Deposition Controller User Manual
Page 73
3 - 9
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
Generally, install the sensor as far as possible from the evaporation source (a
minimum of 10" or 25.4 mm) while still being in a position to accumulate
thickness at a rate proportional to accumulation on the substrate.
shows proper and improper methods of installing sensors.
To guard against spattering, use a source shutter or crystal shutter to shield the
sensor during the initial soak periods. If the crystal is hit with even a minute
particle of molten material, it may be damaged and stop oscillating. Even in
cases when it does not completely stop oscillating, it may become unstable.
Figure 3-4 Sensor Installation Guidelines
O BSTRUC TIO N
INC O RREC T
INC O RREC T
INC O RREC T
SO URC E
C O RREC T
SENSORS
C O RREC T