INFICON XTC/C Thin Film Deposition Controller - Manual (Page 93)

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XTC/C - XTC/2 Operating Manual
S4 . . . . . . Phase currently in process. x
S4 Response Codes
0 . . . . . . . Ready phase
1 . . . . . . . Source switch phase
2 . . . . . . . Rise 1 phase
3 . . . . . . . Soak 1 phase
4 . . . . . . . Rise 2 phase
5 . . . . . . . Soak 2 phase
6 . . . . . . . Shutter delay phase
7 . . . . . . . Deposit phase
8 . . . . . . . Rate ramp phase
9 . . . . . . . Manual phase
10 . . . . . . Time power phase
11 . . . . . . Idle ramp phase
12 . . . . . . Idle phase
S5 . . . . . . Phase time (mm:ss). xx:xx
S6 . . . . . . Active layer. x
S7 . . . . . . Active film x
S8 . . . . . . Active crystal. x
S9 . . . . . . Crystal life (%). x % to xx %
S10 . . . . . Power source number. x (1 or 2)