INFICON XTC/C Thin Film Deposition Controller - Manual (Page 150)

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XTC/C - XTC/2 Operating Manual
6.2.2 Parameter Update Errors
ERR 1 . . . . . Parameter out of range; the value attempted to be entered was
outside of the instrument’s acceptable range. This is cleared with
the
key. Refer to Table 4-2 on page 4-8 for parameter ranges.
LOC . . . . . . Parameter entry (or alteration) attempted while the PARAMETER
LOCK configuration switch is set or the parameters are locked
out through remote communications. LOC is also displayed when
attempting to update certain parameters (sensor, source, layer)
during an active process.
6.2.3 Other Errors
Err 7 . . . . . . Processor out of time error. It is not expected that this error will
be seen by a user.
6.3 Troubleshooting Guide
If the instrument fails to work, or appears to have diminished performance, the
following Symptom/Cause chart may be helpful.
WARNING
There are no user serviceable components within the
instrument case.
Potentially lethal voltages are present when the line
cord, system I/O or aux I/O are connected.
Refer all maintenance to qualified personnel.
CAUTION
This instrument contains delicate circuitry which is
susceptible to transients. Disconnect the line cord
whenever making any interface connections. Refer all
maintenance to qualified personnel.