2 shuttered and dual sensors – INFICON XTC/C Thin Film Deposition Controller User Manual

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XTC/C - XTC/2 Operating Manual

Figure 6-3 Standard Crystal Sensor (Exploded)

6.4.2 Shuttered and Dual Sensors

There is no difference in the crystal changing procedure between shuttered and
non-shuttered Standard and Compact sensors, since the shutter pivots away
from the crystal opening when the shutter is in the relaxed state.

Crystal Holder

Crystal IPN 008-010-G10 (Package of 10)

Crystal Retainer IPN 007-023

Standard Crystal Sensor Body
IPN 750-207-G1

In-Vacuum
Cable to
Feedthrough

Water Tubes

Finger Spring Contact

IPN 750-171-P1

Fully Coated Face (Gold)

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