INFICON XTC/C Thin Film Deposition Controller User Manual
Page 168
6 - 20
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
6.5.1.2 Feed-Through Or In-Vacuum Cable
Diagnostic Procedure
1
Refer to
Figure 6-8 on page 6-18
. Remove the In-Vacuum cable from the
Sensor Head at point B.
2
Connect the Crystal Sensor Emulator to the In-Vacuum cable.
If the XTAL Fail message disappears after approximately five seconds,
the Feed-Through and In-Vacuum Cable are working properly. Re-install
the In-Vacuum cable to the Sensor Head. Go to section
If the XTAL Fail message remains, continue at step 3.
3
Disconnect the In-Vacuum cable from the Feed-Through and the Emulator.
Disconnect the six-inch BNC cable from the Feed-Through.
4
Using an Ohm Meter, verify electrical continuity from the BNC center pin on
the Feed-Through to the Microdot center pin on the Feed-Through. A typical
value would be less than 0.2 ohms.
5
Verify electrical isolation of the center pin on the Feed-Through from the
electrical ground (Feed-Through body). A typical value would be in excess
of 10 megohms.
If the Feed-Through is found to be defective, replace the Feed-Through,
re-attach the BNC and In-Vacuum cables, and repeat this procedure starting at
Step 2, otherwise continue at step 6.
6
Verify electrical continuity from center pin to center pin on the In-Vacuum
cable.
7
Verify that the center pin of the In-Vacuum cable is electrically isolated from
the In-Vacuum cable shield.
If the In-Vacuum cable is found to be defective, replace the In-Vacuum cable.
Re-attach the BNC and In-Vacuum cables, and repeat this procedure starting
at Step 2, otherwise continue at step 8.
8
Connect the In-Vacuum Cable to the Feed-Through.
9
Verify electrical continuity from the center pin on the BNC connector of the
Feed-Through to the center pin on the un-terminated end of the In-Vacuum
cable.
10
Verify electrical isolation from the center pin to electrical ground
(Feed-Through body).
If the Feed-Through/In-Vacuum cable system is found to be defective, look for
defective electrical contacts at the Feed-Through to In-Vacuum cable
connection. Repair or replace the Feed-Through as necessary. Re-attach the
BNC and In-Vacuum cables and repeat this procedure starting at step 2.
Otherwise, continue at step 11.