INFICON XTC/C Thin Film Deposition Controller - Manual (Page 172)

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XTC/C - XTC/2 Operating Manual
6.5.4 Specifications
Dimensions
1.58 in. diameter x 1.79 in.
(4.01 cm diameter x 4.55 cm)
Temperature Range
0 to 50
o
C
Frequency
760-601-G1: 5.5 MHz ± 30ppm at room temperature
760-601-G2: 5.5 MHz ± 1ppm at room temperature
Materials
304 Stainless Steel, Nylon, Teflon, brass. Some internal components contain
zinc, tin, and lead.